JPH0648331Y2 - シート状物体の物理量測定装置 - Google Patents
シート状物体の物理量測定装置Info
- Publication number
- JPH0648331Y2 JPH0648331Y2 JP1988040875U JP4087588U JPH0648331Y2 JP H0648331 Y2 JPH0648331 Y2 JP H0648331Y2 JP 1988040875 U JP1988040875 U JP 1988040875U JP 4087588 U JP4087588 U JP 4087588U JP H0648331 Y2 JPH0648331 Y2 JP H0648331Y2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- detection
- detection head
- physical quantity
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 54
- 238000005259 measurement Methods 0.000 claims description 9
- 230000005855 radiation Effects 0.000 description 10
- 238000007689 inspection Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000005339 levitation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000005250 beta ray Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988040875U JPH0648331Y2 (ja) | 1988-03-28 | 1988-03-28 | シート状物体の物理量測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988040875U JPH0648331Y2 (ja) | 1988-03-28 | 1988-03-28 | シート状物体の物理量測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01142808U JPH01142808U (en]) | 1989-09-29 |
| JPH0648331Y2 true JPH0648331Y2 (ja) | 1994-12-12 |
Family
ID=31267332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988040875U Expired - Lifetime JPH0648331Y2 (ja) | 1988-03-28 | 1988-03-28 | シート状物体の物理量測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648331Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005054593B4 (de) * | 2005-11-14 | 2018-04-26 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Messonde zur Messung der Dicke dünner Schichten |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS529415U (en]) * | 1975-07-09 | 1977-01-22 | ||
| JPS5211571U (en]) * | 1975-07-15 | 1977-01-26 |
-
1988
- 1988-03-28 JP JP1988040875U patent/JPH0648331Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01142808U (en]) | 1989-09-29 |
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